Microelectromechanical Systems II: Design Principles
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About This Course
This course transitions from fundamental physical principles to the systematic modeling and design of functional Microelectromechanical Systems (MEMS). Divided into five sections, it provides the analytical tools necessary to transform theoretical micro-physics into high-performance sensors and actuators used in global industry.The first section introduces the methodology of Lumped-Element Modeling, teaching students how to simplify complex multiphysics systems into equivalent mass-spring-damper circuits. This module establishes the groundwork for analyzing both static and dynamic MEMS behavio...